Taijiro Uchida Taijiro Uchida

Usefulness of Magnetic Neutral Loop Discharge Plasma in Plasma Processing

M. Itoh, T. Hayashi, Hideo Tsuboi, 1995 .

Observation of Induction Power Dependence on the Magnetic Neutral Loop Discharge Plasma Thermalization Phenomena

Hideo Tsuboi, Taijiro Uchida Taijiro Uchida, Toshio Hayashi Toshio Hayashi, 1997 .