Takeyoshi Kato

High-Speed Damage-Free Contact Hole Etching Using Dual Shower Head Microwave-Excited High-Density-Plasma Equipment

T. Ohmi, S. Sugawa, A. Teramoto, 2004 .

High-Speed Damage-Free Contact Hole Etching Using Dual Shower Head Microwave-Excited High-Density-Plasma Equipment

Tadahiro Ohmi, Shigetoshi Sugawa, Takeyoshi Kato, 2004 .

Adsorption Behavior of Various Fluorocarbon Gases on Silicon Wafer Surface

T. Ohmi, Y. Shirai, A. Teramoto, 2005 .

Adsorption Behavior of Various Fluorocarbon Gases on Silicon Wafer Surface

Tadahiro Ohmi, Takeyoshi Kato, Yasuyuki Shirai, 2005 .

Exact extraction method of trap densities at insulator interfaces using quasi-static capacitance-voltage characteristics and numerical solutions of physical equations

T. Kojiri, M. Kimura, A. Tanabe, 2012 .