T. Pan

Electrostatic microactuator and design considerations for HDD applications

Toshiki Hirano, T. Semba, S. Chan, 1999 .

Calibration Of Microfabricated Shear Stress Sensors

B. Willis, Mehran Mehregany, Eli Reshotko, 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

Microfabricated Shear Stress Sensors, Part 2: Testing and Calibration

Tao Pan, Mehran Mehregany, Eli Reshotko, 1999 .

Microfabricated Shear Stress Sensors, Part 1: Design and Fabrication

Tao Pan, Mehran Mehregany, Steven L. Garverick, 1999 .