Erik H. Anderson

Calibration of the modulation transfer function of surface profilometers with binary pseudo-random test standards: expanding the application range

Valeriy V. Yashchuk, Erik H. Anderson, Samuel K. Barber, 2010, Optical Engineering + Applications.

The SEMATECH high-NA actinic reticle review project (SHARP) EUV mask-imaging microscope

Farhad Salmassi, Iacopo Mochi, Erik H. Anderson, 2013, Photomask Technology.

EUV interferometry of the 0.3-NA MET optic

Jeffrey Bokor, Erik H. Anderson, Patrick P. Naulleau, 2003, SPIE Advanced Lithography.

Characterization of the focal quality of micron-size beams from x-ray mirrors and zone plates

Erik H. Anderson, Barry P. Lai, James H. Underwood, 2001, SPIE Optics + Photonics.

Binary pseudo-random gratings and arrays for calibration of the modulation transfer function of surface profilometers: recent developments

Valeriy V. Yashchuk, Erik H. Anderson, Samuel K. Barber, 2009, Optical Engineering + Applications.

Experimental demonstration of high-resolution three-dimensional x-ray holography

Ian McNulty, Erik H. Anderson, James M. Brase, 1993, Optics & Photonics.

Analysis of spatial resolution and coherence demands in soft x-ray image-plane holographic microscopy with two zone plates

Erik H. Anderson, Weilun Chao, Carmen S. Menoni, 2013, Optics & Photonics - Optical Engineering + Applications.

Binary pseudorandom test standard to determine the modulation transfer function of optical microscopes

Valeriy V. Yashchuk, Erik H. Anderson, Wayne R. McKinney, 2015, SPIE Optical Engineering + Applications.

Ultra-high accuracy optical testing: creating diffraction-limited short-wavelength optical systems

Anton Barty, Regina Soufli, Erik H. Anderson, 2005, SPIE Optics + Photonics.

Nanotomography of labeled cryogenic cells

Erik H. Anderson, Stefan Vogt, Gerd Schneider, 2002, Optics + Photonics.