Qi Yan

A Comprehensive Survey on Pretrained Foundation Models: A History from BERT to ChatGPT

Nanyang Technological University, Philip S. Yu, P. Xie, 2023, ArXiv.

Modeling of SiNx growth by chemical vapor deposition in nanosheet indentation

Yayi Wei, Rui Chen, Junfeng Li, 2023, Advanced Lithography.

Study of selective isotropic etching effects of Si1-xGex in gate-all-around nanosheet transistor process

Yayi Wei, Rui Chen, Xiaobin He, 2023, Advanced Lithography.

Modeling of SiN inner spacer deposition in gate-all-around nanosheet FET process

Jun Yu Li, Yayi Wei, Rui Chen, 2022, Advanced Lithography.