Yukihiro Ushiku

Highly sensitive inspection system for lithography-related faults in agile-fab - detecting algorithm for monitoring and evaluation of yield impact

Hiroshi Matsushita, Kunihiro Mitsutake, Y. Arakawa, 2001 .

Multilevel wiring for a semiconductor integrated circuit device and method for producing multi-level wirings for semiconductor integrated circuits

Takashi Mitsuhashi, Yukihiro Ushiku, 1989 .

New method of extraction of systematic failure component

Kunihiro Mitsutake, Y. Arakawa, T. Ishibumi, 2001, 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203).

Performance fluctuations of 0.10 /spl mu/m MOSFETs-limitation of 0.1 /spl mu/m ULSIs

Tsuyoshi Shibata, Akira Toriumi, Yukihiro Ushiku, 1994, Proceedings of 1994 VLSI Technology Symposium.

Suppression of the floating-body effects in SOI MOSFETs by bandgap engineering

Yukihiro Ushiku, M. Terauchi, Makoto Yoshimi, 1995, 1995 Symposium on VLSI Technology. Digest of Technical Papers.

Analysis of resistance behavior in Ti- and Ni-salicided polysilicon films

Hiroshi Iwai, Tatsuya Ohguro, Yukihiro Ushiku, 1994 .

Technology trends of silicon-on-insulator-its advantages and problems to be solved

Kazuya Matsuzawa, Naoyuki Shigyo, Yukihiro Ushiku, 1994, Proceedings of 1994 IEEE International Electron Devices Meeting.

Suppression of the floating-body effect in SOI MOSFET's by the bandgap engineering method using a Si/sub 1-x/Ge/sub x/ source structure

Kazuya Matsuzawa, Mamoru Terauchi, Naoyuki Shigyo, 1997 .

Suppression of the Floating-Body Effect in SOI MOSFET's by the Bandgap Engineering Method Using a Si Ge Source Structure

Kazuya Matsuzawa, Mamoru Terauchi, Naoyuki Shigyo, 1997 .