S. Shimonishi

Fabrication of Silicon-on-Nothing Structure by Substrate Engineering Using the Empty-Space-in-Silicon Formation Technique

Ichiro Mizushima, Yoshitaka Tsunashima, Satoshi Shimonishi, 2004 .

Eliminating Metal‐Sputter Contamination in Ion Implanter for Low‐Temperature‐Annealed, Low‐Reverse‐Bias‐Current Junctions

Tadashi Shibata, Tadahiro Ohmi, Takahisa Nitta, 1995 .