In-Chan Choi

Post-CMP Cleaning of InGaAs Surface for the Removal of Nanoparticle Contaminants for Sub-10nm Device Applications

Jung-Hwan Lee, L. Teugels, Jin-Goo Park, 2019, ECS Journal of Solid State Science and Technology.

Study on Aluminum Frame Surface Cleaning Process for Photomask Pellicle Fabrication

김현태, 박진구, 이준, 2015 .