S. Asari

A layer-by-layer Cat-CVD of conformal and stoichiometric silicon nitride with in-situ H2 post-treatment

Kazuya Saito, H. Itoh, M. Hayama, 2006 .

Improvement of Amorphous/Microcrystalline Silicon Tandem Junction Solar Cell

Kazuya Saito, M. Hashimoto, N. Tani, 2011 .

Development of catalytic chemical vapor deposition apparatus for large size substrates

Kazuya Saito, M. Kitazoe, Hideo Tsuboi, 2004 .

ULVAC research and development of Cat-CVD applications

Kazuya Saito, M. Hashimoto, M. Takagi, 2008 .