C. Hierold

Surface micromachined ultrasound transducers in CMOS technology

Christofer Hierold, P.-C. Eccardt, Thomas Scheiter, 1996, 1996 IEEE Ultrasonics Symposium. Proceedings.

A novel method to avoid sticking of surface micromachined structures

T. Scheiter, F. Kozlowski, N. Lindmair, 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

MEMS and NEMS

C. Hierold, 2005 .

Intelligent CMOS sensors

Christofer Hierold, C. Hierold, 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308).