Yasuo Hasegawa

An Automated Impedance Estimation Method in Low-Voltage Distribution Network for Coordinated Voltage Regulation

Bo Kyu Kwon, Sekyung Han, Soohee Han, 2016, IEEE Transactions on Smart Grid.

Optimization procedure of exposure tools with polarization aberrations

Akihiro Yamada, Kenichiro Mori, Yasuo Hasegawa, 2008, SPIE Advanced Lithography.

The solution to enhance i-line stepper applications by improving mix and match process overlay accuracy

Ryo Sasaki, Seiya Miura, Yasuo Hasegawa, 2014, Advanced Lithography.

New projection optics and aberration control system for the 45-nm node

Seiya Miura, Kazuhiko Mishima, Yasuo Hasegawa, 2007, SPIE Advanced Lithography.