Z.L. Zhang

Selective chemical vapor deposition of tungsten for microdynamic structures

N. C. MacDonald, Z. L. Zhang, J. J. Yao, 1989, IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'.

SCREAM I: A single mask, single-crystal silicon process for microelectromechanical structures

N. C. MacDonald, K. A. Shaw, Z. L. Zhang, 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.

SCREAM I: A single mask, single-crystal silicon, reactive ion etching process for microelectromechanical structures

N. C. MacDonald, K. A. Shaw, Z. L. Zhang, 1994 .