K. Sato
发表
K. Sato,
S. Tanaka,
H. Hashimoto,
1991,
TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.
N. Yoshimoto,
M. Kobayashi,
S. Tanaka,
1988
.
A. Koide,
A. Koide,
K. Sato,
1991,
[1991] Proceedings. IEEE Micro Electro Mechanical Systems.