Y. Kojima
发表
Shinji Sugatani,
Takashi Maruyama,
Masaaki Miyajima,
2008,
SPIE Advanced Lithography.
M. Kotera,
M. Yamabe,
Y. Ishida,
2000,
Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387).
Haruyuki Nomura,
Takashi Kamikubo,
Noriaki Nakayamada,
2021,
Photomask Technology.