ChunRong Pan

Modeling and scheduling of cluster tools dealing with wafer revisiting: A brief review

MengChu Zhou, NaiQi Wu, Yan Qiao, 2015, 2015 IEEE 12th International Conference on Networking, Sensing and Control.

A Novel Algorithm for Wafer Sojourn Time Analysis of Single-Arm Cluster Tools With Wafer Residency Time Constraints and Activity Time Variation

MengChu Zhou, Naiqi Wu, Yan Qiao, 2015, IEEE Transactions on Systems, Man, and Cybernetics: Systems.

How to start-up dual-arm cluster tools involving a wafer revisiting process

MengChu Zhou, Yan Qiao, ChunRong Pan, 2015, 2015 IEEE International Conference on Automation Science and Engineering (CASE).

How to Respond to Process Module Failure in Residency Time-Constrained Single-Arm Cluster Tools

MengChu Zhou, NaiQi Wu, Yan Qiao, 2014, IEEE Transactions on Semiconductor Manufacturing.

Petri net-based deadlock avoidance for single-arm cluster tools with concurrently processing two-type wafers

Naiqi Wu, Yufeng Chen, Yan Qiao, 2018, 2018 IEEE 15th International Conference on Networking, Sensing and Control (ICNSC).

Petri net-based response policies to process module failure in time-constrained single-arm cluster tools

MengChu Zhou, Naiqi Wu, Yan Qiao, 2014, Proceedings of the 11th IEEE International Conference on Networking, Sensing and Control.

Response Policies to Process Module Failure in Single-Arm Cluster Tools Subject to Wafer Residency Time Constraints

MengChu Zhou, Naiqi Wu, Yan Qiao, 2015, IEEE Transactions on Automation Science and Engineering.

A novel failure response policy for single-arm cluster tools with residency time constraints

MengChu Zhou, Naiqi Wu, Yan Qiao, 2014, 2014 IEEE International Conference on Systems, Man, and Cybernetics (SMC).

Scheduling Cluster Tools in Semiconductor Manufacturing: Recent Advances and Challenges

MengChu Zhou, NaiQi Wu, Yan Qiao, 2018, IEEE Transactions on Automation Science and Engineering.

Simulation modeling and visualization of start-up transient processes of dual-arm cluster tools with wafer revisiting

MengChu Zhou, Naiqi Wu, Yan Qiao, 2014, 2014 IEEE International Conference on Systems, Man, and Cybernetics (SMC).