David Reibold

发表

Fast rigorous simulation of mask diffraction using the waveguide method with parallelized decomposition technique

Feng Shao, Andreas Erdmann, Peter Evanschitzky, 2008, European Mask and Lithography Conference.

Simulation of larger mask areas using the waveguide method with fast decomposition technique

Feng Shao, Andreas Erdmann, Peter Evanschitzky, 2007, SPIE Photomask Technology.