M. Kellam

Multilevel Metal Using Submicron Copper Interconnects

S. Bobbio, B. Rogers, S. Bothra, 1992, The 24th Southeastern Symposium on and The 3rd Annual Symposium on Communications, Signal Processing Expert Systems, and ASIC VLSI Design System Theory.

Analysis of the effects of scaling on interconnect delay in ULSI circuits

S. Bothra, M. Kellam, C. M. Osburn, 1993 .

Cost of Ownership Model for Process Gas Improvements

M. Kellam, C. Osburn, S. Wechter, 1993, Proceedings. IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop.