Marie N. Amistoso

Step and flash imprint lithography for sub-100-nm patterning

C. Grant Willson, Matthew Colburn, John G. Ekerdt, 2000, Advanced Lithography.

Patterning nonflat substrates with a low pressure, room temperature, imprint lithography process

Marie N. Amistoso, C. Willson, M. Colburn, 2001 .