B. Masi

Out of plane vs in plane flexural behaviour of thin polysilicon films: Mechanical characterization and application of the Weibull approach

Alberto Corigliano, B. De Masi, C. Riva, 2005, Microelectron. Reliab..

Characterization of Polysilicon Strength through On-Chip Testing at MEMS Stoppers

S. Mariani, A. Ghisi, G. Gattere, 2023, International Conference on Thermal, Mechanial and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems.

Electro-mechanical modelling and experimental characterization of a high-aspect-ratio electrostatic-capacitive MEMS device

M. Ferrari, V. Ferrari, R. Ardito, 2017 .

Experimental and Numerical Assessment of the Multi-physics Dynamic Response for a MEMS Accelerometer at Various Gaps

Marco Ferrari, Raffaele Ardito, Vittorio Ferrari, 2016 .

The effect of nano-scale interaction forces on the premature pull-in of real-life Micro-Electro-Mechanical Systems

Alberto Corigliano, R. Ardito, A. Frangi, 2012, Microelectron. Reliab..

On-Chip Electrostatically Actuated Bending Tests for the Mechanical Characterization of Polysilicon at the Micro Scale

Alberto Corigliano, Biagio De Masi, F. Cacchione, 2005 .

Mechanical characterization of polysilicon through on-chip tensile tests

C. Comi, A. Corigliano, A. Frangi, 2004, Journal of Microelectromechanical Systems.