D. Li

Fabrication of Aluminum Nitride Films by Reactive Pulse DC Magnetron Sputtering for Vibration Energy Harvester

Z. Shang, D. Li, S. Wang, 2015 .

Low temperature Si/Si wafer direct bonding using a plasma activated method

Zhi-yu Wen, Zheng-guo Shang, Dong-ling Li, 2013, Journal of Zhejiang University SCIENCE C.

Low-Cost Fabrication Strategies of Microfluidic Device on Glass Substrate

Z. Wen, Z. Shang, D. Li, 2011 .

A MEMS Piezoelectric Cantilever Beam Array for Vibration Energy Harvesting

Licheng Deng, Z. Wen, Z. Shang, 2013 .

The Fabrication of Piezoelectric Vibration Energy Harvester Arrays Based on AlN Thin Film

Xingqiang Zhao, Z. Wen, Z. Shang, 2013 .