M. Sumisaka

ScAlN Lamb wave resonator in GHz range released by XeF2 etching

M. Esashi, Shuji Tanaka, A. Teshigahara, 2013, 2013 IEEE International Ultrasonics Symposium (IUS).

Sputter deposition of ScAlN using large size alloy target with high Sc content and reduction of Sc content in deposited films

K. Hashimoto, T. Omori, S. Fujii, 2015 .

Highly c-axis-oriented ScAlN thin films deposited using Sc-Al alloy target

K. Hashimoto, T. Omori, S. Fujii, 2015, 2015 IEEE MTT-S International Microwave Symposium.

Deposition of highly c-axis-oriented ScAlN thin films by RF magnetron sputtering using a Sc-Al alloy target

K. Hashimoto, T. Omori, S. Fujii, 2014, 2014 IEEE International Frequency Control Symposium (FCS).

Sputter Deposition of ScAlN Thin Films Using a Sc-Al Alloy Target Sc-Al ScAlN

K. Hashimoto, T. Omori, S. Fujii, 2014 .