Toshi Kasai

Modeling for pad wear control during conditioning in CMP

Toshi Kasai, Sriram Anjur, Haresh Siriwardane, 2011 .

A kinematic analysis of disk motion in a double sided polisher for chemical mechanical planarization (CMP)

Toshi Kasai, 2008 .

AFM study of perfluoroalkylsilane and alkylsilane self-assembled monolayers for anti-stiction in MEMS/NEMS

Bharat Bhushan, Patrik Hoffmann, Toshi Kasai, 2005 .

A surface topography-independent friction measurement technique using torsional resonance mode in an AFM

Bharat Bhushan, Toshi Kasai, B. Bhushan, 2004 .

Imaging and measurement of elasticity and friction using the TRmode

Bharat Bhushan, Toshi Kasai, Ute Rabe, 2005 .