Paul M. Feeney

Modeling for pad wear control during conditioning in CMP

Toshi Kasai, Sriram Anjur, Haresh Siriwardane, 2011 .

9:20-9:40 "A Case Study for Fixed Abrasives in CMP: Production Acceptance of a New Technology through Performance, Persistence and Partnerships,"

J. Kim, L. Economikos, Sriram Anjur, 2006 .

Brittle and Ductile Fracture Mechanics Analysis of Surface Damage Caused During CMP

Terry A. Ring, Shoutian Li, Paul M. Feeney, 2007 .