Chu-Shik Kang

发表

Double-ended Fizeau interferometers with phase-stepping evaluation for measurement of cubes

Gerhard Boensch, R. Arnold Nicolaus, Chu-Shik Kang, 1998, Optics & Photonics.

Calibration of two-dimensional nanometer gratings using optical diffractometer and metrological atomic force microscope

Byong Chon Park, Jae Wan Kim, Tae Bong Eom, 2005, SPIE Optics + Photonics.

One-shot measurement of surface profile using an astigmatic microscope system

Jae Wan Kim, Jong-Ung Lee, Tae-Bong Eom, 2010, Photonics Europe.

Novel interferometer for three-dimensional coordinate measurement of freely moving objects

Jae Wan Kim, Tae Bong Eom, Chu-Shik Kang, 2003, SPIE Optical Metrology.

Development of a precision dual level stage system for the dimensional metrology of large range surface topography

Jae Wan Kim, Tae Bong Eom, Chu-Shik Kang, 2007, SPIE Optical Engineering + Applications.

Development of Line Standards Measurement System Using an Optical Microscope

Tae-Bong Eom, Chu-Shik Kang, Jong-Ahn Kim, 2009 .

Simultaneous measurement of the thickness profile and refractive index distribution of silicon wafers

Jae Wan Kim, Jungjae Park, Chu-Shik Kang, 2013, Defense, Security, and Sensing.

An optical absolute position measurement method using a phase-encoded single track binary code.

Jae Wan Kim, Tae Bong Eom, Chu-Shik Kang, 2012, The Review of scientific instruments.

An optical straightness measurement sensor for the KRISS watt balance

Jae Wan Kim, Tae Bong Eom, Chu-Shik Kang, 2015 .

Design and Fabrication of a Step Height Certified Reference Material for Multi-probe Inspection Instruments

Chu-Shik Kang, Jong-Ahn Kim, Jonghan Jin, 2011 .

A novel Michelson interferometer combined with an autocollimator for the simultaneous measurement of linear and angular displacement

Jae Wan Kim, Tae Bong Eom, Chu-Shik Kang, 2005, SPIE Optics + Photonics.

Holographic fringe interpretation by FFT and carrier-fringe method

Yeong-Uk Ko, Young H. Kwon, Chu-Shik Kang, 1993, Optics & Photonics.

Absolute length calibration of gauge blocks using optical comb of a femtosecond pulse laser

Seung-Woo Kim, Young-Jin Kim, Chu-Shik Kang, 2006, SPIE Optics + Photonics.

Calibration of angle artifacts and instruments using a high precision angle generator

Jae Wan Kim, Tae Bong Eom, Chu-Shik Kang, 2013 .

Calibration of integrating sphere system designed for roughness correction in optical calibration of gauge blocks

Jae Wan Kim, Tae Bong Eom, Chu-Shik Kang, 2007, SPIE Optical Engineering + Applications.

Development of a Signal Conditioning Circuit for Capacitive Displacement Sensors and Performance Evaluation

Tae-Bong Eom, Chu-Shik Kang, Jong-Ahn Kim, 2007 .

Gauge block calibration by using a high speed phase shifting interferometer comprising two frequency scanning diode lasers

Jae Wan Kim, Chu-Shik Kang, Jong-Ahn Kim, 2009, Optical Metrology.

Calibrating vertical magnification of surface roughness tester by using EMT and heterodyne laser interferometer

Chu-Shik Kang, 1996, International Commission for Optics.

Absolute Planar Position and Full Angle Orientation Sensor Using a 2-D Color-Coded Binary Scale

Jae Wan Kim, Chu-Shik Kang, Jong-Ahn Kim, 2020, IEEE Transactions on Instrumentation and Measurement.

Automatic measurement of gauge blocks by Fourier transforming the scanned interferograms

Jae Wan Kim, Won-Kyu Lee, Ho Suhng Suh, 2005, SPIE Optics + Photonics.

Automated calibration of multiple long gauge blocks using the KRISS linear measuring system

Chu-Shik Kang, Jong-Ahn Kim, Jae Yong Lee, 2020 .

Uncertainty evaluation of the geometrical thickness and refractive index of silicon wafers

Jae Wan Kim, Jungjae Park, Chu-Shik Kang, 2013, Defense, Security, and Sensing.

Characteristics of laser scanning confocal microscopes for surface texture measurements

Chu-Shik Kang, Jariya Buajarern, Jae Wan Kim, 2013 .

Interferometric profile scanning system for measuring large planar mirror surface based on single-interferogram analysis using Fourier transform method

Tae Bong Eom, Chu-Shik Kang, Jong-Ahn Kim, 2018 .

A passive method to compensate nonlinearity in a homodyne interferometer.

Soohyun Kim, Chu-Shik Kang, Jong-Ahn Kim, 2009, Optics express.

A compact system for simultaneous measurement of linear and angular displacements of nano-stages.

Hong Jin Kong, Chu-Shik Kang, Jong-Ahn Kim, 2007, Optics express.

A simple phase-encoding electronics for reducing the nonlinearity error of a heterodyne interferometer

Byong Chon Park, Chu-Shik Kang, Jae Wan Kim, 2008 .

KEY COMPARISON: APMP.L-K1: Calibration of gauge blocks by interferometry: Final Report

Akiko Hirai, Hirokazu Matsumoto, Sitian Gao, 2006 .

Precision depth measurement of through silicon vias (TSVs) on 3D semiconductor packaging process.

Chu-Shik Kang, Jong-Ahn Kim, Jonghan Jin, 2012, Optics express.

Absolute angle measurement using a phase-encoded binary graduated disk

Tae Bong Eom, Chu-Shik Kang, Jong-Ahn Kim, 2016 .

Time-of-flight detection of femtosecond laser pulses for precise measurement of large microelectronic step height.

Kebin Shi, Chan-Gi Jeon, Chu-Shik Kang, 2018, Optics letters.

Metrological atomic force microscope using a large range scanning dual stage

Tae Bong Eom, Chu-Shik Kang, Jong-Ahn Kim, 2009 .

Note: high precision angle generator using multiple ultrasonic motors and a self-calibratable encoder.

Tae Bong Eom, Chu-Shik Kang, Jong-Ahn Kim, 2011, The Review of scientific instruments.

Thickness and refractive index measurement of a silicon wafer based on an optical comb.

Tae Bong Eom, Chu-Shik Kang, Jong-Ahn Kim, 2010, Optics express.

A digital signal processing module for real-time compensation of nonlinearity in a homodyne interferometer using a field-programmable gate array

Tae Bong Eom, Chu-Shik Kang, Jong-Ahn Kim, 2009 .

Precision angle comparator using self-calibration of scale errors based on the equal-division-averaged method

Tae Bong Eom, Chu-Shik Kang, Jong-Ahn Kim, 2013 .

Absolute length calibration of gauge blocks using optical comb of a femtosecond pulse laser

Young-Jin Kim, Chu-Shik Kang, Jonghan Jin, 2006 .

An interferometric Abbe-type comparator for the calibration of internal and external diameter standards

Tae Bong Eom, Chu-Shik Kang, Jong-Ahn Kim, 2010 .

High-speed measurement of three-dimensional surface profiles up to 10 μm using two-wavelength phase-shifting interferometry utilizing an injection locking technique.

Hae Yong Park, Chu-Shik Kang, Jong-Ahn Kim, 2011, Applied optics.