Toru Tatsumi

Ultra-Thin TiN/Ta,OJW Capacitor Technology for 1GBit DRAM

Akira Sakai, Satoshi Kamiyama, Hiroshi Suzuki, 1993 .

A silicon bipolar transistor using MBD technology

F. Sato, Tsutomu Tashiro, T. Niino, 1990 .

Fluorinated Amorphous Carbon Thin Films Grown from C 4 F 8 for Multilevel Interconnections of Integrated Circuits

Kazuhiko Endo, Yoshihisa Matsubara, Toru Tatsumi, 1996 .