Haruo Okano

A semiconductor device having an improved wiring structure and methods of manufacturing this semiconductor device

Nobuo Hayasaka, Junichi Wada, Hisashi Kaneko, 1993 .

An exposure method for the manufacture of a semiconductor device

Tohru Watanabe, Haruo Okano, Hiroyuki Yano, 1991 .

Cl2/Ar Plasma Etching of a Contaminated Layer on Si Induced by Fluorocarbon Gas Plasma

Masahiro Shibagaki, Haruo Okano, Yasuhiro Horiike, 1981 .

Etching Characteristics of n+ Poly-Si and Al Employing a Magnetron Plasma

Haruo Okano, Yasuhiro Horiike, Takashi Yamazaki, 1984 .