Bin Liu

Modeling and Control for Deadlock-Free Operation of Single-Arm Cluster Tools With Concurrently Processing Multiple Wafer Types via Petri Net

Naiqi Wu, Yufeng Chen, Yan Qiao, 2021, IEEE Access.

Dual-Arm Cluster Tool Scheduling for Reentrant Wafer Flows

N. Wu, Yan Qiao, Zhiwu Li, 2023, Electronics.

An Efficient Binary Integer Programming Model for Residency Time-Constrained Cluster Tools With Chamber Cleaning Requirements

N. Wu, Yan Qiao, Yanjun Lu, 2022, IEEE Transactions on Automation Science and Engineering.

A Virtual Wafer-based Scheduling Method for Dual-arm Cluster Tools with Chamber Cleaning Requirements

N. Wu, Yan Qiao, Yanjun Lu, 2021, 2021 IEEE International Conference on Networking, Sensing and Control (ICNSC).