J. Mark Noworolski

Microassembly technologies for MEMS

Kenneth A. Goldberg, Roger T. Howe, Michael B. Cohn, 1998, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

Self-aligned polysilicon MEMS-reduced mask count surface micromachining

Seth R. Sanders, J. Mark Noworolski, 1998, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

Parallel switched circuit simulation on networked workstations

J. Mark Noworolski, Seth R. Sanders, Ben B. Sheng, 1994 .

Microassembly technologies for MEMS

Kenneth A. Goldberg, Roger T. Howe, J. M. Noworolski, 1998, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

Microresonant devices for power conversion

Seth R. Sanders, J. Mark Noworolski, 1998, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

Microassembly technologies for MEMS

Kenneth A. Goldberg, Roger T. Howe, Michael B. Cohn, 1998, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

Microassembly technologies for MEMS

Kenneth A. Goldberg, Roger T. Howe, Michael B. Cohn, 1998, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

Process for in-plane and out-of-plane single-crystal-silicon thermal microactuators

Kurt E. Petersen, Nadim I. Maluf, J. M. Noworolski, 1996 .

Fabrication of SOI wafers with buried cavities using silicon fusion bonding and electrochemical etchback

Kurt E. Petersen, Nadim I. Maluf, J. Mark Noworolski, 1996 .