Mitsuru Sato

发表

Single component chemically-amplified resist based on dehalogenation of polymer

Hiroki Yamamoto, Takahiro Kozawa, Seiichi Tagawa, 2007, SPIE Advanced Lithography.

A novel pixel structure for 2 &mgr;m square pixel IT-CCD

Mitsuru Sato, Makoto Fujishima, Gen Sakoda, 2007, Electronic Imaging.

2A1-14 A Lifting Cushion to Assist Rising from a Wheelchair

Tohru Ifukube, Shuichi Ino, Mitsuru Sato, 2005 .

Tri-layer resist process for fabricating sub 45-nm L&S patterns by EPL

Kazuyuki Matsumaro, Fumihiro Koba, Takahiro Kozawa, 2006, SPIE Advanced Lithography.

Impregnation of resist with functional molecules using supercritical fluid: a new approach to resist engineering for advanced lithography

Mitsuru Sato, Hideo Namatsu, 2005, SPIE Advanced Lithography.

Integration using KrF and ArF resist materials in a full via first dual-damascene process scheme with CVD OSG low-k dielectric

Mitsuru Sato, Ming Hui Fan, Steven Alan Lytle, 2002, SPIE Advanced Lithography.

A Preliminary Study of a Power Assist System for Toe Exercise using a Metal Hydride Actuator

Kazuhiko Yamashita, Mitsuru Sato, Takashi Izumi, 2009 .

Development of Screening Method for an Frail Elderly by Measurement Quantitative Lower Limb Muscular Strength

Kazuya Imaizumi, Yumi Iwakami, Kazuhiko Yamashita, 2010 .

Mask patterning process using the negative tone chemically amplified resist TOK OEBR-CAN024

Dirk Beyer, Mitsuru Sato, Joerg Butschke, 2004, Photomask Japan.

Establishing of Joint Compliance for a Mobility Aid Touching Softly with the Body of a Disabled Person

Tohru Ifukube, Shuichi Ino, Mitsuru Sato, 1997 .

Chemically amplified molecular resist based on fullerene derivative for nanolithography

Takahiro Kozawa, Seiichi Tagawa, Katsumi Ohmori, 2008, SPIE Advanced Lithography.

Servo tracking apparatus for optical information recording / reproducing apparatus

Mitsuru Sato, Kazuo Takahashi, Junichi Furukawa, 2001 .

Preliminary design of a simple passive toe exercise apparatus with a flexible metal hydride actuator for pressure ulcer prevention

Shuichi Ino, Mitsuru Sato, Takashi Izumi, 2010, 2010 Annual International Conference of the IEEE Engineering in Medicine and Biology.

Materials Selection and Activity Evaluation System to Reduce Radioactive Waste from Steel Reinforced Concrete of Nuclear Plants

Akira Hasegawa, Mitsuru Sato, Ken-ichi Kimura, 2006 .

Development of a Knee-gap Force Measurement Device to Evaluate Quantitative Lower Limb Muscular Strength of the Elderly

Kazuya Imaizumi, Yumi Iwakami, Kazuhiko Yamashita, 2010 .

Diagonal layout and surface strap trench (DST) cell [embedded DRAMs]

Mitsuru Sato, Shigeyoshi Watanabe, Takeshi Hamamoto, 2000, International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138).

Deep-UV immersion interferometric lithography

Will Conley, Mitsuru Sato, Ralph R. Dammel, 2004, SPIE Advanced Lithography.

Resist development status for immersion lithography

Mitsuru Sato, Tomoyuki Hirano, Masaaki Yoshida, 2005, SPIE Advanced Lithography.

Development Status of High Performance Materials for Immersion Lithography

Mitsuru Sato, Keita Ishizuka, Mitsuru Sato, 2004 .

Study on acid generation from polymer

Hiroki Yamamoto, Takahiro Kozawa, Seiichi Tagawa, 2005 .

Recent Progress in New Acetal-based Resist for Electron Beam Lithography

Mitsuru Sato, Hiroshi Komano, Takuma Hojo, 2003 .

Reaction mechanism of fluorinated chemically amplified resists

Hiroki Yamamoto, Takahiro Kozawa, Seiichi Tagawa, 2006 .

Monte Carlo study of high performance resists for SCALPEL nanolithography

Mitsuru Sato, Myrtle I. Blakey, Warren K. Waskiewicz, 2000 .

Dependence of acid generation efficiency on the protection ratio of hydroxyl groups in chemically amplified electron beam, x-ray and EUV resists

Hiroki Yamamoto, Takahiro Kozawa, Seiichi Tagawa, 2004 .

Growth of 2 inch ZnO bulk single crystal by the hydrothermal method

Mitsuru Sato, Tsuguo Fukuda, T. Fukuda, 2005 .

Analyses of Delamination Arrest Effect of Dimples on Interface in LSI Package.

Mitsuru Sato, Shuichi Tani, Ryoji Yuuki, 1994 .

Proton Dynamics in Chemically Amplified Electron Beam Resists

Hiroki Yamamoto, Takahiro Kozawa, Seiichi Tagawa, 2004 .

Using Cavitation Peening to Improve the Fatigue Life of Titanium Alloy Ti-6Al-4V Manufactured by Electron Beam Melting

Masaaki Nakai, Mitsuru Sato, Hitoshi Soyama, 2016 .

Potential Cause of Inhomogeneous Acid Distribution in Chemically Amplified Resists for Post Optical Lithography

Hiroki Yamamoto, Takahiro Kozawa, Seiichi Tagawa, 2005 .

Stress formation in solidifying bodies. Solidification in a round continuous casting mold

Mitsuru Sato, Karl-Hermann Tacke, Mitsuru Sato, 1998 .

Growth of the 2-in-size bulk ZnO single crystals by the hydrothermal method

Mitsuru Sato, Tsuguo Fukuda, T. Fukuda, 2004 .

Boundary Element Analysis of Steady-State Heat Conduction and Thermal Stress in the LSI Package

Mitsuru Sato, Ryoji Yuuki, Sumio Yoshioka, 1990 .

Imaging capabilities of resist in deep ultraviolet liquid immersion interferometric lithography

Will Conley, William D. Hinsberg, Mitsuru Sato, 2004 .