S. Shimura

发表

Y. Kamei, S. Kawakami, L. Huli, 2023, Advanced Lithography.

K. Nafus, M. Demand, Y. Feurprier, 2023, Advanced Lithography.

M. Somervell, K. Nafus, S. Nagahara, 2023, Advanced Lithography.

Satoru Shimura, Hideharu Kyoda, Tetsu Kawasaki, 2006, SPIE Advanced Lithography.

K. Petrillo, M. Burkhardt, S. Nagahara, 2023, Advanced Lithography.

G. Vandenberghe, K. Nafus, S. Nagahara, 2022, Journal of Photopolymer Science and Technology.

K. Petrillo, A. Hubbard, D. Hetzer, 2022, Advances in Patterning Materials and Processes XXXIX.