Marc Veillerot

发表

Evaluation of outgassing contamination effects on optical surfaces of the LIL

Philippe Bouchut, Gaëlle F. Guehenneux, Marc Veillerot, 2005, SPIE Laser Damage.

Long-term performances of very high-laser-damage resistance mirrors

Pierre Garrec, Bernard Andre, Philippe Bouchut, 2003, SPIE Laser Damage.

(Invited) Sequential 3D Process Integration: Opportunities for Low Temperature Processing

Laurent Brunet, Bernard Previtali, Perrine Batude, 2017 .

Functionalization of Silica Nanoparticles and Native Silicon Oxide with Tailored Boron-Molecular Precursors for Efficient and Predictive p-Doping of Silicon

S. Kerdiles, Hervé Fontaine, François Martin, 2015 .

Structural, electrical and optical properties of in-situ phosphorous-doped Ge layers

J. M. Fedeli, Marc Veillerot, Jean-Paul Barnes, 2012 .

An investigation into the traffic-related fraction of isoprene at an urban location

Nadine Locoge, J. C. Galloo, Hervé Fontaine, 2001 .

Evaluation of the airborne molecular contamination inside the LIL

I. Tovena, Marc Veillerot, M. Veillerot, 2006 .

Study of the Volatile Organic Contaminants Absorption and their Reversible Outgassing by FOUPs

Hervé Fontaine, Sylviane Cetre, Adrien Danel, 2009 .

Deposition kinetic of airborne organic contamination on wafers measured by TD-GC/MS

Sylviane Cetre, Adrien Danel, F. Tardif, 2003 .