D. Shyu

Scatterometry-based metrology with feature region signatures matching.

Yi-Sha Ku, Deh-Ming Shyu, Shih-Chun Wang, 2006, Optics express.

High-resolution through-focus metric with two-pitch grating target

Mao-hong Lu, D. Shyu,, Chun-Hung Ko, 2007 .

Analysis of the through-focus images with boundary-element method in high resolution optical metrology

Mao-hong Lu, D. Shyu, 2006 .

Angle-resolved scatterfield microscope for linewidth measurement

Yi-Sha Ku, Deh-Ming Shyu, Wei-Te Hsu, 2009, Advanced Lithography.

Angular scatterometry for line-width roughness measurement

Yi-Sha Ku, Deh-Ming Shyu, Nigel Smith, 2007, SPIE Advanced Lithography.

Overlay measurement based on dual-overlay grating image

Yi-Sha Ku, Deh-Ming Shyu, Shu-Ping Dong, 2008, SPIE Advanced Lithography.