S. S. Kim

Multichamber Integrated Deposition System For Silicon Based Dielectric Films

Gerald Lucovsky, David V. Tsu, Gregory N. Parsons, 1989, Other Conferences.

Formation Of Silicon-Based Heterostructures In Multichamber Integrated-Processing Thin-Film Deposition Systems

J. T. Fitch, Gerald Lucovsky, David V. Tsu, 1990, Other Conferences.