H. Masusaki

Quantum Chemical Mechanism of Heterogeneous Reaction between Trichlorosilane and Adsorbed Water

K. Nakamura, Y. Ishihara, Koh Matsumoto, 2003 .

Trace moisture measurement in HCl gas by near-infrared diode LASER spectroscopy

Shang–Qian Wu, T. Kimijima, H. Masusaki, 1995, Proceedings of International Symposium on Semiconductor Manufacturing.

Determination of trace moisture in gases by diode-laser multi-pass absorption spectroscopy.

Hiroaki Kuze, Nobuo Takeuchi, H. Kuze, 2000 .

Quantitative Analysis of Trace Moisture in N(2) and NH(3) Gases with Dual-Cell Near-Infrared Diode Laser Absorption Spectroscopy.

H. Masusaki, T. Kimishima, S. Wu, 1998, Analytical chemistry.

Proposal of Near-Infrared Laser Diode Spectroscopy at 1.74 μm for HCl Monitor in Semiconductor Processes

H. Kuze, N. Takeuchi, A. Ubukata, 1999 .