M. Georgieva

3D to 2D perspectives - Traditional and new doping and metrology challenges at the nanoscale

R. Duffy, N. Petkov, M. Georgieva, 2023, Materials Science in Semiconductor Processing.

Electron beam lithography and dimensional metrology for fin and nanowire devices on Ge, SiGe and GeOI substrates

R. Duffy, M. Myronov, G. Fagas, 2023, Microelectronic Engineering.