Tomoko Kamimoto

Improvement of unified mask data formats for EB writers

Nobuyuki Yoshioka, Yutaka Hojyo, Junji Hirumi, 2004, Photomask Japan.

Investigation of an enhanced mask data preparation system using unified mask data formats

Nobuyuki Yoshioka, Toshio Suzuki, Junji Hirumi, 2003, SPIE Photomask Technology.

Development of New Stream Format with GDSII Upper Compatibility and High-Compression Rate

Nobuyuki Yoshioka, Junji Hirumi, Morihisa Hoga, 2002, Photomask Technology.

GDS2NEO: high-compression data processing system for a new EB handling format

Nobuyuki Yoshioka, Junji Hirumi, Koki Kuriyama, 2003, Photomask Japan.

Unified mask data formats for EB writers

Nobuyuki Yoshioka, Toshio Suzuki, Junji Hirumi, 2003, Photomask Japan.