Akira Imai

Approximation of in-resist image by aerial image with 1/n-times shorter wavelength

Shuji Nakao, Jun Abe, Takashi Okagawa, 2004, SPIE Advanced Lithography.

OPC-free on-grid fine random hole pattern formation utilizing double resist patterning with double RETs

Shuji Nakao, Akira Imai, Shinroku Maejima, 2007, SPIE Advanced Lithography.

A COMPARATIVE STUDY ON THE RELATIONSHIP BETWEEN THE SCALE OF CITIES AND URBAN ENVIRONMENTAL INDICATORS IN JAPAN, KOREA AND CHINA

Hidefumi Imura, Shinji Kaneko, Akira Imai, 2000 .

Reconstruction of Local Governments Been Evacuated by the Nuclear Power Plant Disaster

Akira Imai, 2014 .

Defect quality management of 248nm alt-PSM in low-k1 condition

Yasutaka Morikawa, Akira Imai, Hiroshi Mohri, 2005, Photomask Japan.

A proposed image intensity expressing local irradiance

Shuji Nakao, Akira Imai, Shinroku Maejima, 2009, Advanced Lithography.

Characteristics and Behavior of Hydrothermal Fluids for Gold Mineralization at the Hishikari Deposits, Kyushu, Japan

Akira Imai, R. Takahashi, A. Takeuchi, 2017 .