T. Gerlach

A new micropump principle of the reciprocating type using pyramidic micro flowchannels as passive valves

T Gerlach, M Schuenemann, H Wurmus, 1995 .

Pumping gases by a silicon micro pump with dynamic passive valves

T. Gerlach, T. Gerlach, 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

Working principle and performance of the dynamic micropump

Helmut Wurmus, Torsten Gerlach, H. Wurmus, 1995, Proceedings IEEE Micro Electro Mechanical Systems. 1995.