Ichio Yudasaka Ichio Yudasaka

Low Temperature Poly-Si TFTs Using Solid Phase Crystallization of Very Thin Films and an Electron Cyclotron Resonance Chemical Vapor Deposition Gate Insulator

T. Nakazawa, T. Little, H. Koike, 1991 .

TFT and Physical Properties of Poly-Crystalline Silicon Prepared by Very Low Pressure Chemical Vapour Deposition (VLPCVD)

M. Miyasaka, T. Nakazawa, Hiroyuki Ohshima Hiroyuki Ohshima, 1991 .

Wettability of Silicon Oxide with Poly-Crystalline Silicon

M. Miyasaka, T. Komatsu, Wataru Itoh, 1994 .