Alexander Elia

Nonconventional applications of Mueller matrix-based scatterometry for advanced technology nodes

Alok Vaid, Dhairya Dixit, Nick Keller, 2018 .

Hybrid metrology solution for 1X node technology

Alok Vaid, Hiroki Kawada, Cornel Bozdog, 2012, Advanced Lithography.

Hybrid metrology: from the lab into the fab

Alok Vaid, Cornel Bozdog, Shay Wolfling, 2014 .

Advanced applications of scatterometry based optical metrology

Alok Vaid, Dhairya Dixit, Nick Keller, 2017, Advanced Lithography.