Jody A. Fronheiser

发表

Nonconventional applications of Mueller matrix-based scatterometry for advanced technology nodes

Alok Vaid, Dhairya Dixit, Nick Keller, 2018 .

Assessment of critical dimension small-angle x-ray scattering measurement approaches for FinFET fabrication process monitoring

Benjamin Bunday, Aaron Cordes, Jody A. Fronheiser, 2014 .

Mueller based scatterometry measurement of nanoscale structures with anisotropic in-plane optical properties

Alain C. Diebold, Gangadhara Raja Muthinti, Brennan Peterson, 2013, Advanced Lithography.

Heterogeneous integration of semiconducting and carbide nanowires on Si substrates

Jody A. Fronheiser, Joleyn Balch, Loucas Tsakalakos, 2006, SPIE Optics East.

Fin stress and pitch measurement using X-ray diffraction reciprocal space maps and optical scatterometry

Alain C. Diebold, Gangadhara Raja Muthinti, Matthew Wormington, 2013, Advanced Lithography.

Frequency-Dependent Charge Pumping on 4H-SiC MOSFETs

Vinayak Tilak, Kin P. Cheung, Jody A. Fronheiser, 2012 .

Strong broadband optical absorption in silicon nanowire films

Min-Yi Shih, Jody A. Fronheiser, Matthew Pietrzykowski, 2007 .

Measurement of periodicity and strain in arrays of single crystal silicon and pseudomorphic Si1-xGex/Si fin structures using x-ray reciprocal space maps

Alain C. Diebold, Gangadhara Raja Muthinti, Matthew Wormington, 2014 .

Spin dependent charge pumping in SiC metal-oxide-semiconductor field-effect-transistors

Patrick M. Lenahan, Aivars J. Lelis, Jody A. Fronheiser, 2011 .