S. Koga

Experimental Verification of the Importance of Slot Position in Microwave Plasma Production with Slot Antenna Array

S. Koga, Hirotaka Toyoda, 2015 .

A new on-machine measurement system to measure wavefront aberrations of projection optics with hyper-NA

T. Tezuka, S. Koga, T. Mori, 2006, SPIE Advanced Lithography.

Computer effort saving methods in unsteady calculations of room airflows and thermal environments

S. Koga, M. Mizuno, J. Onishi, 1998 .