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J. Lee
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Effects of annealing temperature on the characteristics of HfSixOy/HfO2 high-k gate oxides
H. D. Kim, N. Lee, Y. H. Lee, 2004 .
Via hole process for GaAs monolithic microwave integrated circuit using two‐step dry etching
H. R. Kim, B. Kim, M. Chung, 1993 .