Aleksandr Yu. Vinokhodov

Development of high-power EUV sources for lithography

Vladimir M. Borisov, Guido Schriever, Juergen Kleinschmidt, 2002, SPIE Advanced Lithography.

Discharge produced plasma source for EUV lithography

Vladimir M. Borisov, Oleg B. Khristoforov, Yurii B. Kirykhin, 2007, Laser Optics.

Compact Z-pinch EUV source for photolithography

Uwe Stamm, Dirk Basting, Vladimir M. Borisov, 2001, SPIE Advanced Lithography.

Recent advances in the development of coherent and incoherent UV and EUV discharge sources

Vladimir M. Borisov, Oleg B. Khristoforov, Andrei I. Demin, 2004, Laser Optics.