J. Taguchi

Killer defects control on patterned wafers for the sub quarter micron interconnect formation process

M. Ikota, Junichi Taguchi, A. Sugimoto, 1998, IWSM. 1998 3rd International Workshop on Statistical Metrology (Cat. No.98EX113).

Discrimination of clustered defects on wafers using statistical methods

H. Sato, M. Ikota, J. Taguchi, 1997, 1997 2nd International Workshop on Statistical Metrology.