S. Linder

Fabrication technology for wafer through-hole interconnections and three-dimensional stacks of chips and wafers

H. Baltes, E. Doering, S. Linder, 1994, Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems.

Photolithography in anisotropically etched grooves

H. Baltes, E. Doering, S. Linder, 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.