Markus Degünther

Control for micromirror arrays in lithography systems

Jan Horn, Johannes Eisenmenger, Markus Degünther, 2016 .

Performance of a programmable illuminator for generation of freeform sources on high NA immersion systems

Markus Degünther, Oscar Noordman, Stephen Hsu, 2009, Lithography Asia.

Compensation of the position errors of optical elements by adapting their additively manufactured mounting structure

Markus Degünther, Patrick Pfuhl, M. Degünther, 2021, Optical Systems Design.

Influence of inhomogeneous surface albedo on UV irradiance: Effect of a stratus cloud

Markus Degünther, R. Meerkötter, M. Degünther, 2000 .