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4.4 - Tiny Mid- and Long-Wave Infrared Spectrometer Mo¬dule with a MEMS Dual-Band Fabry-Pérot Filter

N. Neumann, K. Hiller, S. Hoppe, 2011 .

Uncooled IR sensors with tunable MEMS Fabry-Pérot filters for the long-wave infrared range

N. Neumann, K. Hiller, M. Ebermann, 2010, 2010 IEEE Sensors.

Recent advances in expanding the spectral range of MEMS Fabry-Perot filters

Karla Hiller, Steffen Kurth, Martin Ebermann, 2010, MOEMS-MEMS.