Donghun Kwak

A High-performance X/Y-axis Microaccelerometer Fabricated on SOI Wafer without Footing Using the Sacrificial Bulk Micromachining (SBM) Process

Dong-il Dan Cho, Jongpal Kim, Sangjun Park, 2003 .

Extended Sacrificial Bulk Micromachining Process and Its Application to the Fabrication of X-axis Single-crystalline Silicon Micro-gyroscope

Dong-il Dan Cho, Hyoungho Ko, Jongpal Kim, 2003 .

A Novel Z-Axis Accelerometer With Perfectly-Aligned, Fully-Offset Vertical Combs Fabricated Using The Extended Sacrificial Bulk Micromachining Process

Hyoungho Ko, Jongpal Kim, Sangjun Park, 2003, Int. J. Comput. Eng. Sci..

Feedback Control for Expanding Range and Improving Linearity of Microaccelerometers

Kunsoo Huh, Sangjun Park, Yonghwa Park, 2004 .

Selective silicon-on-insulator (SOI) implant: a new micromachining method without footing and residual stress

Hyoungho Ko, Taeyong Song, Donghun Kwak, 2005 .

A planar, x-axis, single-crystalline silicon gyroscope fabricated using the extended SBM process

Hyoungho Ko, Donghun Kwak, Jongpal Kim, 2004, 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.

Robust SOI process without footing and its application to ultra high-performance microgyroscopes

Dong-il Dan Cho, Hyoungho Ko, Donghun Kwak, 2004 .

A Novel z-axis Accelerometer Fabricated on a Single Silicon Substrate Using the Extended SBM Process

Kunsoo Huh, Hyoungho Ko, Taeyong Song, 2004 .