Kristel Möldre

Atomic layer deposition of epitaxial TiO2 II on c-sapphire

J. Aarik, H. Mändar, A. Tarre, 2013 .

Atomic layer deposition of rutile and TiO2-II from TiCl4 and O3 on sapphire: Influence of substrate orientation on thin film structure

J. Aarik, H. Mändar, L. Aarik, 2015 .